Type: Clean-Sheet Design, Volume Manufacturing
Industry: Life Sciences
Number of axes: two, XY
Special components: combination of precision ground ballscrew and air bearings for accurate, low friction position. Flexures introduced controlled compliance and select directions.
Key System Characteristics
- Accuracy: 20 µm (open loop)
- Repeatability: 3 µm (open loop)
- In-Position Stabiity: ≤100 nm, with no vacuum