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Type: Clean-Sheet Design, Volume Manufacturing

Industry: Life Sciences

Layout: cartesian

Number of axes: two, XY

Special components: combination of precision ground ballscrew and air bearings for accurate, low friction position. Flexures introduced controlled compliance and select directions.

Key System Characteristics

  • Accuracy: 20 µm (open loop)
  • Repeatability: 3 µm (open loop)
  • In-Position Stabiity: ≤100 nm, with no vacuum



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