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Hexagonal shapes

NPXY200Z25-103

High-precision piezo stage

NPXY200Z25-103 Nanopositioning Piezo Stage

Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

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Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

Part Number3715103
Footprint100mm W x 100mm D x 35mm H
DiameterNA
Aperture38mm ∅
MaterialAluminum
Maximum Load1kg
Max Force (Push/Pull)100N/20N
Stage Mass560g
Nanomotion ControlXYZ
Closed-loop Travel200µm|200µm|25µm
Open-loop Travel (-30 to 150 V)270µm|270µm|35µm
Position Noise0.5nm|0.5nm|0.1nm
Stiffness0.5N/µm|0.5N/µm|13.1N/µm
Resonant Frequency350Hz|350Hz|1600Hz
Settling Time15ms|15ms|2ms
Linearity Deviation0.01%|0.01%|0.04%
Capacitance7.5µF|7.5µF|3.1µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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