NPXY200Z25-103
High-precision piezo stage
Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.
| Part Number | 3715103 |
| Footprint | 100mm W x 100mm D x 35mm H |
| Diameter | NA |
| Aperture | 38mm ∅ |
| Material | Aluminum |
| Maximum Load | 1kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 560g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 200µm|200µm|25µm |
| Open-loop Travel (-30 to 150 V) | 270µm|270µm|35µm |
| Position Noise | 0.5nm|0.5nm|0.1nm |
| Stiffness | 0.5N/µm|0.5N/µm|13.1N/µm |
| Resonant Frequency | 350Hz|350Hz|1600Hz |
| Settling Time | 15ms|15ms|2ms |
| Linearity Deviation | 0.01%|0.01%|0.04% |
| Capacitance | 7.5µF|7.5µF|3.1µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
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Related Resources:
What is a Piezo Flexure Stage?
A Piezo Stage can be characterized as a mechanical device, driven by a piezoelectric actuator, which provides one or more axis of motion.