
NPXY200Z25-103
High-precision piezo stage
Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.
Part Number | 3715103 |
Footprint | 100mm W x 100mm D x 35mm H |
Diameter | NA |
Aperture | 38mm ∅ |
Material | Aluminum |
Maximum Load | 1kg |
Max Force (Push/Pull) | 100N/20N |
Stage Mass | 560g |
Nanomotion Control | XYZ |
Closed-loop Travel | 200µm|200µm|25µm |
Open-loop Travel (-30 to 150 V) | 270µm|270µm|35µm |
Position Noise | 0.5nm|0.5nm|0.1nm |
Stiffness | 0.5N/µm|0.5N/µm|13.1N/µm |
Resonant Frequency | 350Hz|350Hz|1600Hz |
Settling Time | 15ms|15ms|2ms |
Linearity Deviation | 0.01%|0.01%|0.04% |
Capacitance | 7.5µF|7.5µF|3.1µF |
Integrated Sensor | Capacitive |
Cable Length | 2m |
Controller | LC.403 |
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