
NPXY60Z20-257
Non-magnetic, UHV-compatible piezo stage
A non-magnetic, UHV compatible, XYZ nanopositioning piezo stage. Very fast and precise, includes a small footprint and versatile aperture.
Part Number | 3715257 |
Footprint | 30mm H X 70mm ∅ |
Aperture | 20mm ∅ |
Material | Aluminum |
Maximum Load | 1kg |
Nanomotion Control | XYZ |
Closed-loop Travel | 60µm|60µm|20µm |
Position Noise | 0.4nm|0.4nm|0.2nm |
Resonant Frequency | 750Hz|750Hz|2000Hz |
Settling Time | 5ms|5ms|2ms |
Linearity Deviation | 0.03%|0.03%|0.05% |
Controller | LC.403 |
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