Life Sciences

Multi Axis Flexure Stages with Piezo Actuators for Nano-positioning Applications:

• 1 Axis, 2 Axis, 3 Axis, and Tip Tilt configurations.
• Microscope objective stages with 100µm, 250µm, 400µm, 500µm 1000µm range

Benefits of Piezo Flexure Stages

• Great Reliability
• High-Speed Motion
• Billions of Cycles
• Millisecond Step and Settle Times
• Smooth Linear Motion
• Nanometer Positional Accuracy
• Can be fitted with a strain gauge or capacitive sensor for closed-loop feedback.
• No Friction
• Operate in UHV Environments
• Extremely low Parasitic Motion
• Low Out-of-Plane Motion
• Long Term Stability