Challenge: The customer needed XY Stage that provided great repeatability and fine positioning while moving, while also providing great stability when not in action.
Solution: Motion Solutions selected granite material for the X-axis base for flatness. We used THK Precision-grade KR33 actuators and Lin Engineering high-resolution 0.45 degree NEMA 23 stepper motors for motion. New Way air bearings were integrated into the top carriage, as well as a support bearing for the X axis. A flexure was added to the top carriage to allow for the air bearings to lift when in action and for the air bearings to sit on the granite for added friction and/or pulling vacuum to stabilize the carriage when not in motion.
Result: Motion Solutions was able to provide a custom solution at the price point that the customer was looking for while working closely with the customer to integrate their unique design aspects. Motion Solutions also had the necessary technology and knowledge to design, assemble, and test the units per the customer’s requirements. The final stage design was integrated into the final product and has since gone into production, averaging 20 units a year. The resulting stage performed better than the target specifications achieving and Accuracy of 20 µm (open loop), a Repeatability of 3 µm (open loop), and In-Position Stability of less than 100 nm, with no vacuum