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Hexagonal shapes

nPX600

Compact piezo stage

Compact nanopositioning piezo stage with 600µm range. It is part of the nPX product line.

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Compact nanopositioning piezo stage with 600µm range.

Part Number3715505
Footprint72mm W x 76mm D x 18mm H
MaterialStainless Steel
Maximum Load300g
Max Force (Push/Pull)50N/20N
Stage Mass560
Nanomotion ControlX
Closed-loop Travel600µm
Open-loop Travel (-30 to 150 V)700µm
Position Noise3nm
Stiffness0.4N/µm
Resonant Frequency165Hz
Settling Time25ms
Linearity Deviation0.01%
Capacitance6.5µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.400

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