Skip to Content
Hexagonal shapes

NPXY200Z100-271

Large aperture 3-axis piezo stage

NPXY200Z100-271 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Request Quote

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715271
Footprint140mm W x 140mm D x 38mm H
DiameterNA
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass990g
Nanomotion ControlXYZ
Closed-loop Travel200µm|200µm|100µm
Open-loop Travel (-30 to 150 V)240µm|240µm|135µm
Position Noise0.7nm|0.7nm|0.3nm
Stiffness1.5N/µm|2.0N/µm|5.6N/µm
Resonant Frequency350Hz|350Hz|450Hz
Settling Time15ms|15ms|10ms
Linearity Deviation0.01%|0.01%|0.02%
Capacitance7.5µF|7.5µF|5.5µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

Related Resources: