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Compact, 3-axis piezo stage

Compact XYZ nanopositioning piezo stage with 100µm range.

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Compact XYZ nanopositioning piezo stage with 100µm range.

Part Number3715464
Footprint40mm W x 40mm D x 47mm H
MaterialAluminum/SS
Maximum Load1.5kg
Max Force (Push/Pull)15N
Stage Mass160g
Nanomotion ControlXYZ
Closed-loop Travel100µm|100µm|100µm
Open-loop Travel (-30 to 150 V)140µm|140µm|140µm
Position Noise3nm|3nm|3nm
Stiffness0.6N/µm|0.6N/µm|0.6N/µm
Resonant Frequency280Hz|430Hz|280Hz
Settling Time20ms|20ms|20ms
Linearity Deviation0.05%|0.05%|0.05%
Capacitance1.5µF|1.5µF|1.5µF
Integrated SensorStrain Gauge
Cable Length2m
ControllerLC.403

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