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Hexagonal shapes

NPXY100Z25-102

High-precision piezo stage

NPXY100Z25-102 Nanopositioning Piezo Stage

Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

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Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

Part Number3715102
Footprint100mm W x 100mm D x 35mm H
DiameterNA
Aperture38mm ∅
MaterialAluminum
Maximum Load1kg
Max Force (Push/Pull)100N/10N
Stage Mass560g
Nanomotion ControlXYZ
Closed-loop Travel100µm|100µm|25µm
Open-loop Travel (-30 to 150 V)130µm|130µm|35µm
Position Noise0.3nm|0.3nm|0.1nm
Stiffness1.3N/µm|1.3N/µm|15.5N/µm
Resonant Frequency500Hz|500Hz|1600Hz
Settling Time8ms|8ms|3ms
Linearity Deviation0.01%|0.01%|0.04%
Capacitance4.8µF|4.8µF|3.1µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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