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Hexagonal shapes

NPXY100Z25-264

Large-aperture 3-axis piezo stage

NPXY100Z25-264 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

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Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715264
Footprint140mm W x 140mm D x 35mm H
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load1 kg
Nanomotion ControlXYZ
Closed-loop Travel100µm|100µm|25µm
Position Noise0.3nm|0.3nm|0.2nm
Resonant Frequency450Hz|450Hz|700Hz
Settling Time10ms|10ms|5ms
Linearity Deviation0.02%|0.02%|0.02%
ControllerLC.403

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