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Hexagonal shapes

NPXY200Z50-270

Large-aperture 3-axis piezo stage

NPXY200Z50-270 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

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Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715270
Footprint140mm W x 140mm D x 38mm H
DiameterNA
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass1060g
Nanomotion ControlXYZ
Closed-loop Travel200µm|200µm|50µm
Open-loop Travel (-30 to 150 V)240µm|240µm|80µm
Position Noise0.7nm|0.7nm|0.3nm
Stiffness1.0N/µm|1.8N/µm|4.7N/µm
Resonant Frequency350Hz|350Hz|500Hz
Settling Time15ms|15ms|10ms
Linearity Deviation0.01%|0.01%|0.02%
Capacitance7.5µF|7.5µF|4.8µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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