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Hexagonal shapes

NPXY50Z20-477

Compact, high-precision piezo stage

NPXY50Z20-477 Nanopositioning Piezo Stage

XYZ nanopositioning piezo stage with high resonant frequency and compact design allowing easy integration in space constrained applications that require precision control. Designed for scanning applications such as AFM.

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XYZ nanopositioning piezo stage with high resonant frequency and compact design allowing easy integration in space constrained applications that require precision control. Designed for scanning applications such as AFM.

Part Number3715477
Footprint60mm W x 60mm D x 31mm H
MaterialStainless Steel
Maximum Load1kg
Max Force (Push/Pull)100N/10N
Stage Mass365g
Nanomotion ControlXYZ
Closed-loop Travel50µm|50µm|20µm
Open-loop Travel (-30 to 150 V)65µm|65µm|35µm
Position Noise0.2nm|0.2nm|0.1nm
Stiffness3N/µm|3N/µm|14N/µm
Resonant Frequency1200Hz|1200Hz|2000Hz
Settling Time4ms|4ms|2ms
Linearity Deviation0.01%|0.01%|0.1%
Capacitance2.8µF|2.8µF|1.6µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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