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Hexagonal shapes

NPZ25-206

High-precision piezo stage

NPZ70-207 Nanopositioning Piezo Stage

Compact, flexure-guided nanopositioning actuator made of Super Invar.

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Compact, flexure-guided nanopositioning actuator made of Super Invar.

Part Number3715206
Footprint44mm H x 20mm ∅
MaterialSuper Invar
Maximum Load1kg
Max Force (Push/Pull)100N/20N
Stage Mass90g
Nanomotion ControlZ
Closed-loop Travel25µm
Open-loop Travel (-30 to 150 V)40µm
Position Noise0.1nm
Stiffness20.0N/µm
Resonant Frequency4000Hz
Settling Time2ms
Linearity Deviation0.01%
Capacitance1.6µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.400

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