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Hexagonal shapes

RXY3-276 – Redesign underway

Fast, tip-tilt piezo stage

RXY3-276 Nanopositioning Piezo Stage

Fast tip-tilt nanopositioning piezo stage with 3mrad range of motion. It is optimized for use with 1″, 2″ and 3″ mirrors.

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Fast tip-tilt nanopositioning piezo stage with 3mrad range of motion. It is optimized for use with 1″, 2″ and 3″ mirrors.

Part Number3715276
Footprint37.5mm H x 25mm ∅
MaterialInvar 36 or Stainless Steel
Maximum Load3 inch Mirror
Max Force (Push/Pull)NA
Stage Mass90g
Nanomotion ControlTip-Tilt
Closed-loop Travel3mrad
Open-loop Travel (-30 to 150 V)3.5mrad
Position Noise0.05µrad
StiffnessNA
Resonant Frequency2.4 kHz Unloaded, 1.7 kHz with 25mm Ø x 8mm Mirror
Settling Time3ms
Linearity Deviation0.10%
Capacitance1.8µF
Integrated SensorStrain Gauge
Cable Length2m
ControllerLC.402

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